MHCS302 with Vacuum Chuck System

Heating & Cooling Stage MHCS302


  • Wide temperature range;
  • Programmable temperature controller;
  • High precision and high resolution temperature measurement and control;
  • Software or Manual control Horizontal and vertical mounting;
  • Open access to the sample (without cover);
  • Multi vacuum zones for different wafer sizes.

MHCS302 Technical Specification

Temperature RangeConfigured from the room  to 300°C (400 °C available)
Temperature Resolution0.1°C with MTDC600 Temperature Controller
Temperature Stability±0.1°C at 100 °C with MTDC600 Temperature Controller
Temperature Control MethodSwitching PID
Min/Max Heating rateMin 0.1°C/Max 100°C.
Temperature Control SensorRTD
Sample Area50mmx50mm

System Configuration